Измерительное оборудование
Precision Measurement PMISH wafer defect inspection portfolio
上海精测半导体 / Precision Measurement →Оборудование PMISH для инспекции дефектов пластин и review: Vega 300/500, eSpec/eVc, BFI, eView, iView и AeroScan серии для bare wafer, patterned wafer, e-beam review и FIB-SEM сценариев.
Ключевые фишки
- ✓ Vega 300/500: high-sensitivity high-throughput wafer defect inspection.
- ✓ eSpec: large field high-resolution wafer defect metrology/inspection.
- ✓ iView и AeroScan: 12-inch inline FIB-SEM и desktop dual-beam FIB-SEM.
Характеристики
Категория Измерительное оборудование
Visible Series Vega 300; Vega 500; eSpec; eVc; BFI 100; BFI 200; eView 1000; eView 2000; iView; AeroScan
Measurement Types wafer defect inspection; wafer defect review; FIB-SEM; electron beam inspection
Источники
- {'type': 'pdf_page', 'ref': '上海精测半导体技术有限公司_可搜索.pdf:4', 'note': 'Vega/eSpec/eVc portfolio'}
- {'type': 'pdf_page', 'ref': '上海精测半导体技术有限公司_可搜索.pdf:5', 'note': 'Inspection portfolio'}
- {"kind":"official-photo","imageUrl":"https://img.wanwang.xin/contents/sitefiles2025/10129696/images/57328272.png","pageUrl":"https://www.pmish-tech.com/productinfo/3621774.html"}
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